Burner

Abstract

The present invention provides a burner for treating an effluent gas stream from a process tool. The burner comprises a burner liner comprising a porous sleeve at least partially defining a treatment chamber. The porous sleeve is configured to allow a first gaseous composition to flow through towards the treatment chamber. The burner further comprises an array of inlets arranged about the porous sleeve and configured to convey a second gaseous composition through the porous sleeve towards the treatment chamber. The porous sleeve comprises a plurality of interconnected substantially concentric layers, each layer comprising an openwork mesh. A plurality of layers immediately adjacent to at least one inlet of the array are arranged to define a substantially unobstructed flow path for the second gaseous composition to flow through towards the treatment chamber. The substantially unobstructed flow path is aligned with the main direction of flow of second gaseous composition exiting the inlet. At least one layer between the substantially unobstructed flow path and the treatment chamber is arranged to provide a baffle at least partially obstructing the flow path of the second gaseous composition. The present invention also provides an abatement apparatus, and a method for treating an effluent gas stream.

Images