Shape measuring device, surface layer measurement / analysis system, and method for acquiring data of the measured object.

Abstract

This invention provides a measuring apparatus capable of rapidly measuring the surface shape or distance of a large-area object. The shape measuring apparatus includes: a detector for detecting interference light obtained by interfering first light emitted from a light source and reflected by the object with a second light; and an image generation unit for generating an image with pixel values ​​as the output of the photodetector. The photodetector includes: a light-receiving area for receiving interference light and generating charge; multiple inflow areas for allowing the charge generated in the light-receiving area to flow into; and a switch that sequentially switches the charge generated in the light-receiving area at predetermined time intervals, allowing it to flow into the multiple inflow areas. The image generation unit generates an image with pixel values ​​corresponding to the amount of charge flowing into the inflow areas within a predetermined time interval as switched by the photodetector's switch. Thus, images are generated sequentially at predetermined time intervals.

Images