Optical system and method for measuring diffuser plate openings

TW202632220APending Publication Date: 2026-08-01APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2025-11-13
Publication Date
2026-08-01

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Abstract

Approaches herein relate to an optical system and methodology for measuring diffuser plate openings. In one approach, an optical system for analyzing a diffuser may include an optical sensor coupled to a support structure, wherein the optical sensor comprises a lens assembly operable to provide an image of one or more openings of a plurality of openings of the diffuser. The optical system may further include a plurality of alignment plates positionable over the diffuser, wherein each of the plurality of alignment plates comprises a plurality of main openings arranged between a first end and a second end, wherein each of the plurality of main openings is positioned over a set of openings of the plurality of openings of the diffuser, and wherein a base of the support structure is positionable directly atop the plurality of alignment plates.
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