Multi-axial magnetic sensing structure

Abstract

The present invention provides a multi-axial magnetic sensing structure comprising: a frame comprising: a first power input, a second power input, a first power output, a second power output; a first connection component comprising: a first flexible unit, a second flexible unit, a first capacitor, a second capacitor; a first axial motion module; a second connection component comprising: a third capacitor, a fourth capacitor, a third flexible unit, a fourth flexible unit; a second axial motion module. By inputting a first current and winding around the second axial motion module, and inputting a second current and wrapping around the first axial motion module, the first axial motion module and the second axial motion module are able to move according to the external magnetic field, so as to obtain the displacement according to the change of the value of capacitance, and thus obtain the strength of the magnetic field.

Description

Technical Field

[0001] This invention relates to a multi-axis magnetic sensing structure, and more particularly to a magnetic sensing structure capable of simultaneously measuring multi-axis magnetic fields. Prior Technology

[0002] An inertial measurement unit (IMU) is an electronic component that captures information about the motion of an object and measures its attitude. It is also known as an inertial sensor and is mainly composed of a gyroscope and an accelerometer. In some applications, a magnetometer and a barometer are also added to help estimate relevant information. It is often used in vehicle navigation. The following is a brief explanation of inertial sensors.

[0003] Among them, the magnetometer or electronic compass is a component used to measure the magnetic field, to test the strength and direction of the magnetic field, and to locate the orientation of the device. The principle of the magnetometer is similar to that of the compass, and it can measure the angle in the current direction of the device. The magnitude of the magnetic field is usually expressed in Gauss or Tesla. Because the Earth itself has a magnetic field, the magnetometer can calculate the heading of the aircraft by projecting the magnetic field on three axes.

[0004] Magnetometers are generally classified into the following two types based on their internal structure and working principle:

[0005] 1. Mechanical magnetometers, such as suspension wire magnetic scales and blade magnetic scales;

[0006] 2. Electronic magnetometers, such as proton magnetometers, optically pumped magnetometers, and magnetic gate magnetometers.

[0007] Based on their purpose and location of use, they can be simply divided into the following four types:

[0008] 1. Ground magnetometer;

[0009] 2. Airborne magnetometer;

[0010] 3. Marine magnetometer;

[0011] 4. Well magnetometer.

[0012] Based on the magnetic field parameters and their measured values, they can be divided into the following two types:

[0013] 1. Relative measuring instruments, such as suspended vertical magnetometers, measure the relative difference between the vertical components of a magnetic field;

[0014] 2. Measuring instruments, such as proton magnetometers, measure the total strength of the magnetic field; however, they can also measure gradient values.

[0015] The most commonly used magnetometer in daily life is the Lorentz magnetometer. The Lorentz magnetometer is currently a relatively simple and accurate magnetometer. It works by applying a current to the main mass block, causing the mass block to generate a Lorentz force in a magnetic environment due to the current contained within it. This causes the main mass block to vibrate within its own range, and the strength and direction of the magnetic field can be determined by observing the displacement and acceleration of the vibration.

[0016] However, currently, if a Lorentz magnetometer is to provide multi-axis measurement at the same time, it can only be done by installing multiple Lorentz magnetometers or by using a single mass block with multiple drive currents for sensing. This structure cannot provide multi-axis measurement at the same time and requires a switching circuit to achieve the function of multi-axis measurement. Therefore, the circuit design becomes quite complicated. Even if a switching circuit is used to switch the circuit in a very short discrete time to achieve a similar effect to multi-axis measurement, it is not the same as simultaneous multi-axis measurement.

[0017] Therefore, a Lorentz magnetometer capable of sensing multi-axis magnetic fields on a continuous time axis without requiring additional switching circuits, which greatly simplifies circuit design, is the problem that those skilled in the art wish to solve. Summary of the Invention

[0018] One objective of this invention is to provide a multi-axis magnetic field sensing structure, which connects a first axial motion module and a second axial motion module through an outer frame and enables them to have independent circuits. This allows the first axial motion module and the second axial motion module to move simultaneously according to magnetic fields in different directions, and to deduce the magnitude and direction of the surrounding magnetic force by observing the movement, thereby achieving the purpose of accurately measuring the multi-axis magnetic field.

[0019] To achieve the above objectives, the present invention provides a multi-axis magnetic sensing structure for sensing an external magnetic field. The multi-axis magnetic sensing structure includes: an outer frame comprising: a first power input terminal coupled to the outer frame; a second power input terminal coupled to the outer frame; a first power output terminal coupled to the outer frame; and a second power output terminal coupled to the outer frame; and a first connecting component comprising: a first flexible member, one end of which is disposed on a first inner side of the outer frame and coupled to the first power input terminal and the second power output terminal ... Two power input terminals; a second flexible member, one end of which is disposed on the second inner side of one of the outer frames, the second flexible member being disposed opposite to the first flexible member and coupled to the first power output terminal and the second power output terminal; a first differential capacitor, one end of which is disposed on the first inner side of the outer frame and adjacent to the first flexible member; and a second differential capacitor, one end of which is disposed on the second inner side of the outer frame and adjacent to the second flexible member; a first axial motion module, one outer side of which is disposed on the other end of one of the first differential capacitors and the second differential capacitor. One end of one of the capacitors is coupled to and disposed at the other end of one of the first flexible members and the other end of one of the second flexible members; a second connecting assembly includes: a third differential capacitor, one end of which is disposed on the third inner side of one of the first axial motion modules; a fourth differential capacitor, one end of which is disposed on the fourth inner side of one of the first axial motion modules; a third flexible member, one end of which is coupled to and disposed on the fifth inner side of one of the first axial motion modules; and a fourth flexible member, which is disposed corresponding to the third flexible member, the fourth... One end of the flexible element is coupled to and disposed on the sixth inner side of one of the first axial motion modules; and a second axial motion module, one outer side of which is disposed on the other end of one of the third differential capacitors and the other end of one of the fourth differential capacitors. The second axial motion module is coupled to and disposed on the other end of one of the third flexible element and the other end of one of the fourth flexible element, so that it can simultaneously sense magnetic fields in multiple directions within a continuous time period, thereby achieving simultaneous sensing of magnetic fields in multiple directions within a continuous time period without the need for switching circuits.

[0020] This invention provides an embodiment in which a first power input terminal provides a first current that passes through the outer frame, the first flexible member, the first axial motion module, the third flexible member, and to the second axial motion module. The first current then surrounds the second axial motion module, passes through the fourth flexible member, the first axial motion module, the second flexible member, and the outer frame, and finally reaches the first power output terminal. The second axial motion module generates a Z-direction movement based on the external magnetic field and the first current. Changes in the capacitance values ​​of the third and fourth differential capacitors correspondingly generate the movement of the second axial motion module. A first displacement is generated to produce a magnetic field value in the Y direction of the external magnetic field; and a second current is provided by the second power input terminal through the outer frame, the first flexible member to the first axial motion module, the second current surrounds the first axial motion module and then through the second flexible member, the outer frame to the second power output terminal, the first axial motion module generates a Y-direction motion according to the external magnetic field and the second current, and the change in the capacitance value of the first differential capacitor and the second differential capacitor corresponds to the generation of a second displacement of the first axial motion module to generate a magnetic field value in the Z direction of the external magnetic field.

[0021] The present invention provides an embodiment in which the first connecting component further includes: a fifth flexible member, one end of which is disposed on the first inner side of the outer frame and coupled to the first power input terminal and the second power input terminal; and a sixth flexible member, which is disposed opposite to the fifth flexible member, one end of which is disposed on the second inner side of the outer frame and coupled to the first power output terminal and the second power output terminal.

[0022] The present invention provides an embodiment in which a second current is provided at the second power input terminal, passing through the outer frame and the fifth flexible member to the first axial motion module. The second current surrounds the first axial motion module and then passes through the sixth flexible member and the outer frame to the second power output terminal. The first axial motion module generates a Y-direction motion based on the external magnetic field and the second current. The change in the capacitance values ​​of the first differential capacitor and the second differential capacitor corresponds to the generation of a second displacement of the first axial motion module, thereby generating a Z-direction magnetic field value of the external magnetic field.

[0023] The present invention provides an embodiment in which the first axial motion module and the second axial motion module operate simultaneously, and the first axial motion module operates at a first resonant frequency, and the second axial motion module operates at a second resonant frequency.

[0024] Another objective of this invention is to provide a multi-axis magnetic sensing structure, which connects a first axial motion module, a second axial motion module, and a third axial motion module through an outer frame and enables them to have independent circuits. This allows the first axial motion module, the second axial motion module, and the third axial motion module to move simultaneously according to magnetic fields in different directions, and to deduce the magnitude and direction of the surrounding magnetic force by observing the movement, thereby achieving the purpose of accurately measuring the multi-axis magnetic field.

[0025] To achieve the above objectives, the present invention provides a multi-axis magnetic sensing structure for sensing an external magnetic field. The multi-axis magnetic sensing structure includes: an outer frame comprising: a first power input terminal coupled to the outer frame; a second power input terminal coupled to the outer frame; a third power input terminal coupled to the outer frame; a first power output terminal coupled to the outer frame; a second power output terminal coupled to the outer frame; and a third power output terminal coupled to the outer frame; and a third connecting component comprising: a fifth differential capacitor, one end of which is disposed on a first inner side of the outer frame; and a sixth differential capacitor corresponding to the fifth differential capacitor, one end of which is disposed on the outer frame. The outer frame has a second inner side; a seventh flexible member, one end of which is disposed on the seventh inner side of the outer frame and coupled to the first power input terminal, the second power input terminal, the third power input terminal, and the first power output terminal, the second power output terminal, and the third power output terminal; an eighth flexible member, which is disposed opposite to the seventh flexible member, one end of which is disposed on the eighth inner side of the outer frame and coupled to the first power input terminal, the second power input terminal, the third power input terminal, and the first power output terminal, the second power output terminal, and the third power output terminal; and a third axial motion module, one outer side of which is disposed on the other end of one of the fifth differential capacitors and the other end of one of the sixth differential capacitors. An axial motion module is coupled to and disposed at the other end of one of the seventh flexible members and the other end of one of the eighth flexible members; a first connecting assembly includes: a first flexible member, one end of which is disposed on the ninth inner side of one of the third axial motion modules; a second flexible member, one end of which is coupled to and disposed on the tenth inner side of the third axial motion module, the second flexible member being disposed opposite to the first flexible member; a first differential capacitor, one end of which is disposed on the ninth inner side of the third axial motion module and adjacent to the first flexible member; and a second differential capacitor, one end of which is disposed on the tenth inner side of the third axial motion module and adjacent to the second flexible member; a first axial motion module, one outer side of which is disposed on the first differential capacitor. The first axial motion module is coupled to and disposed at the other end of one of the first flexible members and the other end of one of the second flexible members; a second connecting assembly includes: a third differential capacitor, one end of which is disposed on a third inner side of one of the first axial motion modules; a fourth differential capacitor corresponding to the third differential capacitor, one end of which is disposed on a fourth inner side of one of the first axial motion modules; a third flexible member, one end of which is coupled to and disposed on a fifth inner side of one of the first axial motion modules; and a fourth flexible member corresponding to the third flexible member, one end of which is coupled to and disposed on a sixth inner side of one of the first axial motion modules;A second axial motion module is provided, one outer side of which is disposed at the other end of one of the third differential capacitors and the other end of one of the fourth differential capacitors. The second axial motion module is coupled to and disposed at the other end of one of the third flexible members and the other end of one of the fourth flexible members, enabling it to simultaneously sense magnetic fields in multiple directions within a continuous time period. This achieves the simultaneous sensing of magnetic fields in multiple directions within a continuous time period without the need for switching circuits.

[0026] This invention provides an embodiment in which a first power input terminal provides a first current that passes through the outer frame, the eighth flexible member, the third axial motion module, the first flexible member, the first axial motion module, the third flexible member, to the second axial motion module. The first current surrounds the second axial motion module and then passes through the fourth flexible member, the first axial motion module, the second flexible member, the third axial motion module, the eighth flexible member, and the outer frame to the first power output terminal. The second axial motion module generates a Z-direction movement based on the external magnetic field and the first current. Changes in the capacitance values ​​of the third differential capacitor and the fourth differential capacitor correspondingly generate a first displacement of the second axial motion module, thereby generating a Y-direction magnetic field value of the external magnetic field. The second power input terminal provides a second current that passes through the outer frame, the eighth flexible member, the third axial motion module, the first flexible member, to the first axial motion module. The second current surrounds... The first axial motion module passes through the second flexible member, the third axial motion module, the eighth flexible member, and the outer frame to the second power output terminal. The first axial motion module generates a Y-direction motion based on the external magnetic field and the second current. The change in capacitance values ​​of the first differential capacitor and the second differential capacitor corresponds to the second displacement of the first axial motion module, thereby generating a Z-direction magnetic field value of the external magnetic field. The third power input terminal provides a third current that passes through the outer frame and the eighth flexible member to the third axial motion module. The third current surrounds the third axial motion module and then passes through the eighth flexible member and the outer frame to the third power output terminal. The third axial motion module generates a Z-direction motion based on the external magnetic field and the third current. The change in capacitance values ​​of the fifth differential capacitor and the sixth differential capacitor corresponds to the third displacement of the third axial motion module, thereby generating a X-direction magnetic field value of the external magnetic field.

[0027] The present invention provides an embodiment in which the first connecting component further includes: a fifth flexible member, one end of which is disposed on the ninth inner side of the outer frame; and a sixth flexible member, which is disposed opposite to the fifth flexible member, one end of which is disposed on the tenth inner side of the outer frame.

[0028] The present invention provides an embodiment in which the first axial motion module, the second axial motion module and the third axial motion module operate simultaneously.

[0029] The present invention provides an embodiment in which the first axial motion module operates at a first resonant frequency, the second axial motion module operates at a second resonant frequency, and the third axial motion module operates at a third resonant frequency.

[0030] Therefore, a multi-axis magnetic force sensing structure capable of simultaneously measuring multiple axes is provided, which is a problem that those skilled in the art wish to solve. Simple Explanation of the Diagram

[0031] Figure 1: It is a schematic diagram of the two-axis magnetometer of the present invention; Figure 2A: It is a three-dimensional schematic diagram of the biaxial magnetometer of the present invention; Figure 2B: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 2C: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 3A: It is a three-dimensional schematic diagram of the biaxial magnetometer of the present invention; Figure 3B: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 3C: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 3D: This is the frequency response diagram of the present invention; Figure 4A: This is a schematic diagram of the motion of the present invention; Figure 4B: This is a schematic diagram of the motion of the present invention; Figure 4C: This is a schematic diagram of the simultaneous operation of the present invention; Figure 5: This is a schematic diagram of the triaxial magnetometer of the present invention; Figure 6: It is a three-dimensional schematic diagram of the triaxial magnetometer of the present invention; Figure 7A: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 7B: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 7C: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 8: It is a schematic diagram of the triaxial magnetometer of the present invention; Figure 9: It is a three-dimensional schematic diagram of the triaxial magnetometer of the present invention; Figure 10A: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 10B: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 10C: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 11: It is a schematic diagram of the triaxial magnetometer of the present invention; Figure 12: It is a three-dimensional schematic diagram of the triaxial magnetometer of the present invention; Figure 13A: It is a three-dimensional schematic diagram of the current flow of the present invention; Figure 13B: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 13C: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 14: It is a schematic diagram of the triaxial magnetometer of the present invention; Figure 15: It is a three-dimensional schematic diagram of the triaxial magnetometer of the present invention; Figure 16A: This is a three-dimensional schematic diagram of the current flow in this invention; Figure 16B: This is a three-dimensional schematic diagram of the current flow of the present invention; and Figure 16C: It is a three-dimensional schematic diagram of the current flow of the present invention. Implementation

[0032] To enable your review committee to gain a better understanding of the features and effects achieved by this invention, preferred embodiments and detailed descriptions are provided below:

[0033] Currently used Lorentz force magnetometers are mostly single-axis magnetometers. If multi-axis measurements are required, multiple magnetometers need to be set up. This means that multiple sets of magnetometers are needed to measure the magnetic field. If two sets of magnetometers are installed together, the mass block will move due to the Lorentz force because of the circuit winding. The circuit needs to be switched, so it is not possible to measure the signal simultaneously on the continuous time axis at every moment. Instead, the switching can only be done in a very short discrete time. In fact, each axis measures the signal separately to achieve an approximate simultaneous measurement effect.

[0034] This invention utilizes a special structure that connects two or more axial motion modules within an outer frame, enabling the structure to achieve simultaneous movement of multiple axes at any given moment without interfering with each other, and to measure magnetic field signals, all without the need for circuit switching.

[0035] The invention will be described in detail below by way of the drawings illustrating various embodiments thereof. However, the concept of the invention may be embodied in many different forms and should not be construed as being limited to the exemplary embodiments set forth herein.

[0036] First, please refer to Figure 1, which is a schematic diagram of the biaxial magnetometer of the present invention. As shown in the figure, a biaxial magnetic sensing structure 1 of the present invention will be described in detail below. The structure includes: an outer frame 10, which includes: a first power input terminal 12 coupled to the outer frame 10; a second power input terminal 14 coupled to the outer frame 10; and a first power output terminal 16 coupled to the outer frame 10; and a first connecting component 20, which includes: a first flexible member 21, one end of which is disposed on a first inner side S1 of the outer frame 10 and coupled to the outer frame 10. A first power input terminal 12 and a second power input terminal 14; a second flexible member 22, one end of which is disposed on a second inner side S2 of the outer frame 10 and coupled to the first power output terminal 16 and the second power output terminal 17; a first differential capacitor 23, one end of which is disposed on the first inner side S1 of the outer frame 10 and adjacent to the first flexible member 21; and a second differential capacitor 26, one end of which is disposed on the second inner side S2 of the outer frame 10 and adjacent to the second flexible member 22; a first axial motion module 30, one of which is an outer A side-mounted component is disposed at one end of one of the first differential capacitors 23 and the other end of one of the second differential capacitors 26. The first axial motion module 30 is coupled to and disposed at the other end of one of the first flexible members 21 and the other end of one of the second flexible members 22. A second connecting assembly 40 includes: a third differential capacitor 42, one end of which is disposed at the third inner side S3 of one of the first axial motion modules 30; a fourth differential capacitor 44, one end of which is disposed at the fourth inner side S4 of one of the first axial motion modules 30; and a third flexible member 46, one end of which is coupled to... A first axial motion module 30 is connected and disposed on a fifth inner side S5; a fourth flexible member 48 is disposed corresponding to the third flexible member 46, one end of the fourth flexible member 48 is coupled and disposed on a sixth inner side S6 of the first axial motion module 30; and a second axial motion module 50 is disposed on an outer side of the third differential capacitor 42 and the fourth differential capacitor 44, the second axial motion module 50 is coupled and disposed on the other end of the third flexible member 46 and the other end of the fourth flexible member 48.

[0037] Next, please refer to Figure 2A, which is a three-dimensional schematic diagram of the biaxial magnetometer of the present invention. As shown in the figure, in this embodiment, the multiple first differential capacitors 23 and multiple second differential capacitors 26 are provided for balance. Only one first differential capacitor 23 and one second differential capacitor 26 are needed to measure the ambient magnetic field well. In this embodiment, the first flexible member 21, the second flexible member 22, the third flexible member 46, and the fourth flexible member 48 are all repeatedly bent serpentine springs. This is only an example of a preferred embodiment. However, as long as there is a connecting member that can be connected and has elasticity, the effect of the first flexible member 21, the second flexible member 22, the third flexible member 46, and the fourth flexible member 48 of the present invention can be achieved. It is not limited to this.

[0038] Next, please refer to Figure 1 and Figure 2B. Figure 2B is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the first power input terminal 12 provides a first current A1 that passes through the outer frame 10 and along the first flexible member 21 to the first axial motion module 30. The first current A1 passes along the third flexible member 46 to the second axial motion module 50. The first current A1 surrounds the second axial motion module 50 and then passes through the fourth flexible member 48 to the first axial motion module 30. The first current A1 passes through the second flexible member 22 to the first power output terminal 16 of the outer frame 10. By using the first current A1 to surround the second axial motion module 50, the second axial motion module 50 can move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude and direction of the surrounding magnetic field.

[0039] Next, please refer to Figure 1 and Figure 2C. Figure 2C is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the second power input terminal 14 provides a second current A2 that passes through the outer frame 10 and along the first flexible member 21 to the first axial motion module 30. The second current A2 surrounds the first axial motion module 30 and then passes through the second flexible member 22 to the second power output terminal 17 of the outer frame 10. By using the second current A2 to surround the first axial motion module 30, the first axial motion module 30 can move in the Y direction according to the surrounding magnetic field, thereby measuring the magnitude and direction of the surrounding magnetic field.

[0040] Next, please refer to Figure 3A, which is a three-dimensional schematic diagram of the two-axis magnetometer of the present invention. As shown in the figure, the embodiment provided here further includes: a fifth flexible member 24, one end of which is disposed on the first inner side S1 of the outer frame 10 and coupled to the first power input terminal 12 and the second power input terminal 14; and a sixth flexible member 25, which is disposed corresponding to the fifth flexible member 24. One end of the sixth flexible member 25 is disposed on the second inner side S2 of the outer frame 10 and coupled to the first power output terminal 16 and the second power output terminal 17. The fifth flexible member 24 has the same function as the first flexible member 21, and the sixth flexible member 25 has the same function as the second flexible member 22. The addition of the fifth flexible member 24 and the sixth flexible member 25 here is only for balance. If only the first flexible member 21 and the second flexible member 22 are present, the effect of this embodiment can still be achieved.

[0041] Continuing from the above, the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the fifth flexible member 24, and the sixth flexible member 25 in this embodiment are all serpentine bending springs with repeated bending. This is only an example of a preferred embodiment, but as long as there is a connecting member that can be connected and has elasticity, it can achieve the effect of the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the fifth flexible member 24, and the sixth flexible member 25 of the present invention, and is not limited thereto.

[0042] Continuing from the above, the outer frame 10 of the present invention is not limited to being a square frame as shown in Figure 3A. Its main function is to provide power input and output and fixation. It can also be an outer frame of various shapes, and it does not have to be connected on all four sides. The sides of the outer frame 10 can also be unconnected and individually fixed to the capacitor on the outside.

[0043] Please refer to Figure 1 and Figure 3B. Figure 3B is a three-dimensional schematic diagram of the current flow of the present invention. As shown, the first power input terminal 12 provides a first current A1 that passes through the outer frame 10 and along the first flexible member 21 to the first axial motion module 30. The first current A1 passes along the third flexible member 46 to the second axial motion module 50. The first current A1 surrounds the second axial motion module 50 and then passes through the fourth flexible member 48 to the first axial motion module 30. The first current A1 passes through the second flexible member 22 to the first power output terminal 16 of the outer frame 10. By using the first current A1 to surround the second axial motion module 50, the second axial motion module 50 can move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude and direction of the surrounding magnetic field. In this embodiment, the first current A1 can also enter the first axial motion module 30 through the fifth flexible member 24 and then pass through the sixth flexible member 25 to the outer frame 10.

[0044] Next, please refer to Figure 1 and Figure 3C. Figure 3C is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the second power input terminal 14 provides a second current A2 that passes through the outer frame 10 and along the fifth flexible member 24 to the first axial motion module 30. The second current A2 surrounds the first axial motion module 30 and then passes through the sixth flexible member 25 to the second power output terminal 17 of the outer frame 10. By using the second current A2 to surround the first axial motion module 30, the first axial motion module 30 can move in the Y direction according to the surrounding magnetic field, thereby measuring the magnitude and direction of the surrounding magnetic field. In this embodiment, the second current A2 can also enter the first axial motion module 30 through the first flexible member 21 and then go to the outer frame 10 through the second flexible member 22.

[0045] Continuing from the above, since the two circuit paths of the present invention are not the same, the first axial motion module 30 and the second axial motion module 50 operate simultaneously without affecting each other. Next, please refer to Figure 3D, which is the frequency response diagram of the present invention. As shown in the figure, the resonant frequency of the first axial motion module 30 of the present invention is 2600Hz, and the resonant frequency of the second axial motion module 50 is 3600Hz. In this embodiment, the outer frame 10 is used to enable the first axial motion module 30 and the second axial motion module 50 to operate at their respective resonant frequencies of 2600Hz and 3600Hz without affecting each other, ensuring that the signal magnitude is consistent with that during single-axis operation. The resonant frequency here is only used as an example for illustration and is not limited thereto.

[0046] Next, please refer to Figures 3B and 4A. Figure 4A is a schematic diagram of the motion of the present invention. As shown in the figure, when the second axial motion module 50 has the first current A1 flowing through it and there is a magnetic field around it, the second axial motion module 50 will move back and forth in a seesaw manner in the Z direction. At this time, its displacement can be measured through the third differential capacitor 42 and the fourth differential capacitor 44. In this embodiment, the third differential capacitor 42 and the fourth differential capacitor 44 are both parallel plate differential capacitors. The differential capacitors can effectively reduce the signals brought by other movement directions, so as to reduce the influence brought by the magnetometers coupled to two different axes.

[0047] Continuing from the above, in Figure 4A, in order to make the displacement of the second axial motion module 50 more obvious, the displacement of the second axial motion module 50 is increased. In fact, the third differential capacitor 42 and the fourth differential capacitor 44 will not be completely separated, and there must still be some contact for the third differential capacitor 42 and the fourth differential capacitor 44 to have the function of measuring displacement.

[0048] Continuing from the above, a calculation method will be provided here. This invention is not limited to using only this calculation method. If the vibration system of the second axial motion module 50 is regarded as a second-order mass-damped-spring system, its dynamic equation is as follows: Formula (1)

[0049] Where M is the equivalent mass, C is the damping coefficient, K is the spring constant, F is the force, and x(t) is the relative displacement of the vibration system relative to the fixed end. Here, the relative displacement of the vibration system relative to the fixed end can be inferred from the capacitance values ​​measured by the third differential capacitor 42 and the fourth differential capacitor 44. The magnitude of the Lorentz force can be calculated using the known equivalent mass, damping coefficient, and spring constant. Since this is a magnetometer, F can be considered as the following equation (ii): Formula (II)

[0050] Following the above, after obtaining the Lorentz force, the strength and direction of the surrounding magnetic field B can be derived through Equation (II).

[0051] Next, please refer to Figure 3C and Figure 4B. Figure 4B is a schematic diagram of the motion of the present invention. As shown in the figure, when the first axial motion module 30 has the second current A2 flowing through it and there is a magnetic field around it, the first axial motion module 30 will reciprocate in the Y direction in the XY plane. At this time, its displacement can be measured through the first differential capacitor 23 and the second differential capacitor 26, and the magnetic field strength and its direction can be calculated accordingly. The calculation method has been clearly described in the above specification and will not be repeated here.

[0052] Continuing from the above, in Figure 4B, in order to make the displacement of the first axial motion module 30 more obvious, the displacement of the first axial motion module 30 is increased. In fact, the first differential capacitor 23 and the second differential capacitor 26 will not be completely separated, and there must still be some contact for the first differential capacitor 23 and the second differential capacitor 26 to have the function of measuring displacement.

[0053] Next, please refer to Figures 3A, 3B, and 4C. Figure 4C is a schematic diagram of the simultaneous motion of the present invention, illustrating the simultaneous motion of Figures 4A and 4B. As shown in the figure, when the first axial motion module 30 has the second current A2 flowing through it, and the second axial motion module 50 has the first current A1 flowing through it, and a magnetic field exists in the surrounding area, the first axial motion module 30 exhibits a reciprocating motion in the Y direction, and the second axial motion module 50 exhibits a seesaw-like back-and-forth motion in the Z direction. At this time, the displacement can be measured through the first differential capacitor 23, the second differential capacitor 26, the third differential capacitor 42, and the fourth differential capacitor 44, and the magnetic field strength and direction can be calculated accordingly. The calculation method has been clearly described in the above specification and will not be repeated here. In this way, by moving the first axial motion module 30 and the second axial motion module 50 in two different directions, multiple magnetic fields in multiple directions can be sensed simultaneously in a continuous time without switching circuits.

[0054] Continuing from the above, in Figure 4C, in order to make the displacement of the first axial motion module 30 more obvious, the displacement of the first axial motion module 30 and the second axial motion module 50 is increased. In fact, the first differential capacitor 23, the second differential capacitor 26, the third differential capacitor 42 and the fourth differential capacitor 44 will not be completely separated, and there must still be partial contact for the first differential capacitor 23, the second differential capacitor 26, the third differential capacitor 42 and the fourth differential capacitor 44 to have the function of measuring displacement.

[0055] The embodiments described above provide a multi-axis magnetic sensing structure. By providing two non-interfering circuits and using different resonant frequencies, the movements of the first axial motion module 30 and the second axial motion module 50 do not affect each other, enabling them to sense magnetic fields in multiple directions simultaneously within a continuous time period. This achieves the simultaneous sensing of magnetic fields in multiple directions within a continuous time period without the need to switch circuits.

[0056] Please refer to Figure 5, which is a schematic diagram of the triaxial magnetometer of the present invention. As shown in the figure, a triaxial magnetic sensing structure 2 of the present invention will be described in detail below. An outer frame 10 includes: a first power input terminal 12 coupled to the outer frame 10; a second power input terminal 14 coupled to the outer frame 10; a third power input terminal 15 coupled to the outer frame 10; a first power output terminal 16 coupled to the outer frame 10; a second power output terminal 17 coupled to the outer frame 10; a third power output terminal 18 coupled to the outer frame 10; and a third connecting component 60, including: a fifth differential capacitor 62, one end of which is disposed on a first inner side S1 of the outer frame 10; and a sixth differential capacitor 64, which corresponds to the fifth differential capacitor. A sixth differential capacitor 62 is provided, with one end of the sixth differential capacitor 64 located on the second inner side S2 of the outer frame 10; a seventh flexible member 66 has one end located on the seventh inner side S7 of the outer frame 10 and is coupled to the first power input terminal 12, the second power input terminal 14, the third power input terminal 15, and the first power output terminal 16, the second power output terminal 17, and the third power output terminal 18; an eighth flexible member 68 is provided corresponding to the seventh flexible member 66, with one end located on the eighth inner side S8 of the outer frame 10 and coupled to the first power input terminal 12, the second power input terminal 14, the third power input terminal 15, the first power output terminal 16, the second power output terminal 17, and the third power output terminal 18. Power output terminal 18; a third axial motion module 70, one outer side of which is disposed at the other end of one of the fifth differential capacitors 62 and the other end of one of the sixth differential capacitors 64, the third axial motion module 70 being coupled to and disposed at the other end of one of the seventh flexible member 66 and the other end of one of the eighth flexible member 68; a first connecting assembly (not shown), comprising: a first flexible member 21, one end of which is disposed at the ninth inner side S9 of one of the third axial motion modules 70; a second flexible member 22, one end of which is coupled to and disposed at the tenth inner side S10 of the third axial motion module 70; a first differential capacitor 23, one end of which is disposed at the ninth inner side S9 of the third axial motion module 70 and adjacent to the first flexible member 21; and a A second differential capacitor 26, one end of which is coupled to the tenth inner side S10 of the third axial motion module 70 and adjacent to the second flexible member 22; a first axial motion module 30, one outer side of which is disposed at the other end of the first differential capacitor 23 and the other end of the second differential capacitor 26, the first axial motion module 30 being coupled to and disposed at the other end of one of the first flexible members 21 and the other end of one of the second flexible members 22; a second connecting assembly 40, comprising: a third differential capacitor 42, one end of which is disposed at the third inner side S3 of the first axial motion module 30; a fourth differential capacitor 44 corresponding to the third differential capacitor 42, one end of which is disposed at the fourth inner side S4 of the first axial motion module 30;A third flexible member 46, one end of which is coupled to and disposed on a fifth inner side S5 of one of the first axial motion modules 30; and a fourth flexible member 48, which is disposed opposite to the third flexible member 46, one end of which is coupled to and disposed on a sixth inner side S6 of one of the first axial motion modules 30; and a second axial motion module 50, one outer side of which is disposed on the other end of one of the third differential capacitors 42 and the other end of one of the fourth differential capacitors 44, and the second axial motion module 50 is coupled to and disposed on the other end of one of the third flexible members 46 and the other end of one of the fourth flexible members 48.

[0057] Next, please refer to Figure 6, which is a three-dimensional schematic diagram of the triaxial magnetometer of the present invention. As shown in the figure, in this embodiment, the multiple first differential capacitors 23 and multiple second differential capacitors 26 are provided for balance. Only one first differential capacitor 23 and one second differential capacitor 26 are needed to measure the ambient magnetic field well. In this embodiment, the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the seventh flexible member 66, and the eighth flexible member 68 are all repeatedly bent serpentine springs. This is only an example of a preferred embodiment. However, as long as there is a connecting member that can be connected and has elasticity, the effect of the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the seventh flexible member 66, and the eighth flexible member 68 of the present invention can be achieved. This is not a limitation.

[0058] Next, please refer to Figure 5 and Figure 7A. Figure 7A is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the first power input terminal 12 provides a first current A1 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70, and along the first flexible member 21 to the first axial motion module 30. The first current A1 passes along the third flexible member 46 to the second axial motion module 30. The first current A1 surrounds the second axial motion module 50 and then passes through the fourth flexible member 48 to the first axial motion module 30. The first current A1 passes through the second flexible member 22 to the third axial motion module 70. The first current A1 passes through the eighth flexible member 68 to the first power output terminal 16 of the outer frame. By using the first current A1 to surround the second axial motion module 50, the second axial motion module 50 can move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding Y direction magnetic field.

[0059] Next, please refer to Figure 5 and Figure 7B. Figure 7B is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the second power input terminal 14 provides a second current A2 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70, and through the first flexible member 21 to the first axial motion module 30. The second current A2 surrounds the first axial motion module 30 and then passes through the second flexible member 22 to the third axial motion module 70. The second current A2 passes through the eighth flexible member 68 to the second power output terminal 17 of the outer frame 10, so that the first axial motion module 30 can move in the Y direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding Z direction magnetic field.

[0060] Next, please refer to Figure 5 and Figure 7C. Figure 7C is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the third power input terminal 15 provides a third current A3 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70. The third current A3 surrounds the third axial motion module 70 and then passes through the eighth flexible member 68 to the third power output terminal 18 of the outer frame 10, so that the third axial motion module 70 can move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding X-direction magnetic field.

[0061] Continuing from the above, in this embodiment, the first axial motion module 30 translates in the Y direction and thereby senses the magnitude of the magnetic field in the Z direction; the second axial motion module 50 performs a seesaw motion in the Z direction and thereby senses the magnitude of the magnetic field in the Y direction; and the third axial motion module 70 performs a seesaw motion in the Z direction and thereby senses the magnitude of the magnetic field in the X direction.

[0062] Continuing from the above, the calculation method and motion mode of the triaxial magnetic sensing structure 2 and the biaxial magnetic sensing structure 1 of the present invention are the same. The difference is that an additional set of the third axial motion module 70 and the circuit of the third current A3 are added, so that it can have one more axis of sensing and motion direction than the biaxial magnetic sensing structure 1 of the present invention. Since the calculation method and motion mode of the triaxial magnetic sensing structure 2 and the biaxial magnetic sensing structure 1 of the present invention are the same, they will not be described again here.

[0063] Next, another embodiment is provided. Please refer to Figure 8, which is a schematic diagram of the triaxial magnetometer of the present invention. As shown in the figure, the difference between this embodiment and the embodiment corresponding to Figure 5 is that this embodiment further includes: a fifth flexible member 24, one end of which is disposed on the ninth inner side S9 of the outer frame 10, and a sixth flexible member 25, which is disposed corresponding to the fifth flexible member 24. One end of the sixth flexible member 25 is disposed on the tenth inner side S10 of the outer frame 10. The fifth flexible member 24 has the same function as the first flexible member 21, and the sixth flexible member 25 has the same function as the second flexible member 22. The addition of the fifth flexible member 24 and the sixth flexible member 25 is only for balance. If only the first flexible member 21 and the second flexible member 22 are present, the effect of this embodiment can still be achieved.

[0064] Next, please refer to Figure 9, which is a three-dimensional schematic diagram of the triaxial magnetometer of the present invention. As shown in the figure, in this embodiment, the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the fifth flexible member 24, the sixth flexible member 25, the seventh flexible member 66, and the eighth flexible member 68 are all repeatedly bent serpentine springs. This is only an example of a preferred embodiment, but as long as there is a connecting member that can be connected and has elasticity, the effects of the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the fifth flexible member 24, the sixth flexible member 25, the seventh flexible member 66, and the eighth flexible member 68 of the present invention can be achieved, and it is not limited thereto.

[0065] Continuing from the above, the outer frame 10 of the present invention is not limited to being a square frame as shown in Figure 8. Its main function is to provide power input and output and fixation. It can also be an outer frame of various shapes, and it does not have to be connected on all four sides. The sides of the outer frame 10 can also be unconnected and individually fixed to the capacitor on the outside.

[0066] Next, please refer to Figure 8 and Figure 10A. Figure 10A is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the first power input terminal 12 provides a first current A1 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70, and along the fifth flexible member 24 to the first axial motion module 30. The first current A1 passes along the third flexible member 46 to the second axial motion module 30. The first current A1 then surrounds the second axial motion module 50 and passes through the fourth flexible member 48 to the first axial motion module 30. The first current A1 flows through the sixth flexible member 25 to the third axial motion module 70, and through the eighth flexible member 68 to the first power output terminal 16 of the outer frame. The first current A1 surrounds the second axial motion module 50, enabling the second axial motion module 50 to move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding Y direction magnetic field. In this embodiment, the second current A2 can also enter the first axial motion module 30 through the first flexible member 21, and then flow from the second flexible member 22 to the third axial motion module 70.

[0067] Next, please refer to Figure 8 and Figure 10B. Figure 10B is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the second power input terminal 14 provides a second current A2 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70, and through the fifth flexible member 24 to the first axial motion module 30. The second current A2 surrounds the first axial motion module 30 and then passes through the sixth flexible member 25 to the third axial motion module 70. The second current A2 passes through the eighth flexible member 68 to the second power output terminal 17 of the outer frame 10, so that the first axial motion module 30 can move in the Y direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding Z direction magnetic field. In this embodiment, the second current A2 can also enter the first axial motion module 30 through the first flexible member 21 and then pass through the second flexible member 22 to the third axial motion module 70.

[0068] Next, please refer to Figure 8 and Figure 10C. Figure 10C is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the third power input terminal 15 provides a third current A3 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70. The third current A3 surrounds the third axial motion module 70 and then passes through the eighth flexible member 68 to the third power output terminal 18 of the outer frame 10, so that the third axial motion module 70 can move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding X-direction magnetic field.

[0069] Continuing from the above, in this embodiment, the first axial motion module 30 translates in the Y direction and thereby senses the magnitude of the magnetic field in the Z direction; the second axial motion module 50 performs a seesaw motion in the Z direction and thereby senses the magnitude of the magnetic field in the Y direction; and the third axial motion module 70 performs a seesaw motion in the Z direction and thereby senses the magnitude of the magnetic field in the X direction.

[0070] Continuing from the above, the calculation method and motion mode of the triaxial magnetic sensing structure 2 and the biaxial magnetic sensing structure 1 of the present invention are the same. The difference is that an additional set of the third axial motion module 70 and the circuit of the third current A3 are added, so that it can have one more axis of sensing and motion direction than the biaxial magnetic sensing structure 1 of the present invention. Since the calculation method and motion mode of the triaxial magnetic sensing structure 2 and the biaxial magnetic sensing structure 1 of the present invention are the same, they will not be described again here.

[0071] Next, another embodiment is provided. Please refer to Figure 11, which is a schematic diagram of the triaxial magnetometer of the present invention. As shown in the figure, the difference between this embodiment and the embodiment corresponding to Figure 8 is that the first flexible member 21 and the fifth flexible member 24 are changed to be disposed on the third axial motion module 70 on a different side from the first differential capacitor 23, and the second flexible member 22 and the sixth flexible member 25 are disposed on the third axial motion module 70 on a different side from the second differential capacitor 26.

[0072] Next, please refer to Figure 12, which is a three-dimensional schematic diagram of the triaxial magnetometer of the present invention. As shown in the figure, the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the fifth flexible member 24, the sixth flexible member 25, the seventh flexible member 66, and the eighth flexible member 68 of the present invention are all repeatedly bent serpentine springs in this embodiment. This is only an example of a preferred embodiment, but as long as there is a connecting member that can be connected and has elasticity, the effects of the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the fifth flexible member 24, the sixth flexible member 25, the seventh flexible member 66, and the eighth flexible member 68 of the present invention can be achieved, and it is not limited thereto.

[0073] Next, please refer to Figure 11 and Figure 13A. Figure 13A is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the first power input terminal 12 provides a first current A1 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70, and along the second flexible member 22 to the first axial motion module 30. The first current A1 passes along the third flexible member 46 to the second axial motion module 30. The first current A1 surrounds the second axial motion module 50 and then passes through the fourth flexible member 48 to the first axial motion module 30. The first current A1 passes through the sixth flexible member 25 to the third axial motion module 70. The first current A1 passes through the eighth flexible member 68 to the first power output terminal 16 of the outer frame. By using the first current A1 to surround the second axial motion module 50, the second axial motion module 50 can move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding Y direction magnetic field.

[0074] Next, please refer to Figure 11 and Figure 13B. Figure 13B is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the second power input terminal 14 provides a second current A2 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70, and then through the second flexible member 22 to the first axial motion module 30. After passing through the first axial motion module 30, the second current A2 passes through the sixth flexible member 25 to the third axial motion module 70. The second current A2 passes through the eighth flexible member 68 to the second power output terminal 17 of the outer frame 10, so that the first axial motion module 30 can move in the Y direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding X-direction magnetic field.

[0075] Continuing from the above, referring again to Figure 13B, the second current A2 can also be provided through the second power input terminal 14. The second current A2 passes through the outer frame 10 and along the seventh flexible member 66 to the third axial motion module 70, and through the first flexible member 21 to the first axial motion module 30. After passing through the first axial motion module 30, the second current A2 passes through the fifth flexible member 24 to the third axial motion module 70. The second current A2 passes through the seventh flexible member 66 to the two power output terminals 17 of the outer frame 10, so that the first axial motion module 30 can move in the Y direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding X-direction magnetic field.

[0076] Next, please refer to Figure 11 and Figure 13C. Figure 13C is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the third power input terminal 15 provides a third current A3 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70. The third current A3 surrounds the third axial motion module 70 and then passes through the eighth flexible member 68 to the third power output terminal 18 of the outer frame 10, so that the third axial motion module 70 can move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding X-direction magnetic field.

[0077] Continuing from the above, in this embodiment, the first axial motion module 30 translates in the Y direction and thereby senses the magnitude of the magnetic field in the Z direction; the second axial motion module 50 performs a seesaw motion in the Z direction and thereby senses the magnitude of the magnetic field in the Y direction; and the third axial motion module 70 performs a seesaw motion in the Z direction and thereby senses the magnitude of the magnetic field in the X direction.

[0078] Continuing from the above, the calculation method and motion mode of the triaxial magnetic sensing structure 2 and the biaxial magnetic sensing structure 1 of the present invention are the same. The difference is that an additional set of the third axial motion module 70 and the circuit of the third current A3 are added, so that it can have one more axis of sensing and motion direction than the biaxial magnetic sensing structure 1 of the present invention. Since the calculation method and motion mode of the triaxial magnetic sensing structure 2 and the biaxial magnetic sensing structure 1 of the present invention are the same, they will not be described again here.

[0079] Next, another embodiment is provided. Please refer to Figure 14, which is a schematic diagram of the triaxial magnetometer of the present invention. As shown in the figure, the difference between this embodiment and the embodiment corresponding to Figure 5 is that the first differential capacitor 23 is changed to be disposed on the third axial motion module 70 on a different side from the first flexible member 21 and the fifth flexible member 24, and the second differential capacitor 26 is disposed on the third axial motion module 70 on a different side from the second flexible member 22 and the sixth flexible member 25.

[0080] Next, please refer to Figure 15, which is a three-dimensional schematic diagram of the triaxial magnetometer of the present invention. As shown in the figure, the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the fifth flexible member 24, the sixth flexible member 25, the seventh flexible member 66, and the eighth flexible member 68 of the present invention are all repeatedly bent serpentine springs in this embodiment. This is only an example of a preferred embodiment, but as long as there is a connecting member that can be connected and has elasticity, the effects of the first flexible member 21, the second flexible member 22, the third flexible member 46, the fourth flexible member 48, the fifth flexible member 24, the sixth flexible member 25, the seventh flexible member 66, and the eighth flexible member 68 of the present invention can be achieved, and it is not limited thereto.

[0081] Next, please refer to Figures 14 and 16A. Figure 16A is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the first power input terminal 12 provides a first current A1 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70, and along the second flexible member 22 to the first axial motion module 30. The first current A1 passes along the third flexible member 46 to the second axial motion module 30. The first current A1 surrounds the second axial motion module 50 and then passes through the fourth flexible member 48 to the first axial motion module 30. The first current A1 passes through the sixth flexible member 25 to the third axial motion module 70. The first current A1 passes through the eighth flexible member 68 to the first power output terminal 16 of the outer frame. By using the first current A1 to surround the second axial motion module 50, the second axial motion module 50 can move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding Y direction magnetic field.

[0082] Next, please refer to Figures 14 and 16B. Figure 16B is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the second power input terminal 14 provides a second current A2 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70, and then passes through the second flexible member 22 and the sixth flexible member 25 to the first axial motion module 30. After passing through the first axial motion module 30, the second current A2 passes through the first flexible member 21 and the fifth flexible member 24 to the third axial motion module 70. The second current A2 passes through the seventh flexible member 66 to the second power output terminal 17 of the outer frame 10, so that the first axial motion module 30 can move in the Y direction according to the surrounding magnetic field, thereby measuring the magnitude of the surrounding Z direction magnetic field.

[0083] Next, please refer to Figure 14 and Figure 16C. Figure 16C is a three-dimensional schematic diagram of the current flow of the present invention. As shown in the figure, the third power input terminal 15 provides a third current A3 that passes through the outer frame 10 and along the eighth flexible member 68 to the third axial motion module 70. The third current A3 surrounds the third axial motion module 70 and then passes through the eighth flexible member 68 to the third power output terminal 18 of the outer frame 10, so that the third axial motion module 70 can move in the Z direction according to the surrounding magnetic field, thereby measuring the magnitude of the magnetic field in the X direction.

[0084] Continuing from the above, in this embodiment, the first axial motion module 30 translates in the Y direction and thereby senses the magnitude of the magnetic field in the Z direction; the second axial motion module 50 performs a seesaw motion in the Z direction and thereby senses the magnitude of the magnetic field in the Y direction; and the third axial motion module 70 performs a seesaw motion in the Z direction and thereby senses the magnitude of the magnetic field in the X direction.

[0085] Continuing from the above, the calculation method and motion mode of the triaxial magnetic sensing structure 2 and the biaxial magnetic sensing structure 1 of the present invention are the same. The difference is that an additional set of the third axial motion module 70 and the circuit of the third current A3 are added, so that it can have one more axis of sensing and motion direction than the biaxial magnetic sensing structure 1 of the present invention. Since the calculation method and motion mode of the triaxial magnetic sensing structure 2 and the biaxial magnetic sensing structure 1 of the present invention are the same, they will not be described again here.

[0086] The embodiments described above provide a multi-axis magnetic sensing structure. By providing three non-interfering circuits and using different resonant frequencies, the movements of the first axial motion module 30, the second axial motion module 50, and the third axial motion module 70 do not affect each other, enabling them to simultaneously sense magnetic fields in multiple directions within a continuous time period. This achieves the simultaneous sensing of magnetic fields in multiple directions within a continuous time period without the need to switch circuits.

[0087] Therefore, this invention is indeed novel, inventive, and industrially applicable, and undoubtedly meets the requirements for patent application under the Patent Law of our country. Thus, we hereby file an invention patent application in accordance with the law, and earnestly pray that the Bureau will grant the patent as soon as possible.

[0088] However, the above description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. All equivalent changes and modifications made to the shape, structure, features and spirit described in the claims of the present invention should be included in the scope of the claims of the present invention.

[0089] 1: Two-axis magnetic sensing structure 2: Triaxial magnetic sensing structure 10: Outer frame 12: First power input terminal 14: Second power input terminal 15: Third power input terminal 16: First power output terminal 17: Second power output terminal 18: Third power output terminal 20: First connecting component 21: First flexible component 22: Second flexible component 23: First differential capacitor 24: Fifth Flexible Component 25: Sixth flexible component 26: Second differential capacitor 30: First Axial Motion Module 40: Second connection component 42: Third differential capacitor 44: Fourth differential capacitor 46: Third flexible component 48: Fourth flexible component 50: Second Axial Motion Module 60: Third connection component 62: Fifth differential capacitor 64: Sixth differential capacitor 66: Seventh Flexible Component 68: Eighth Flexible Component 70: Third Axis Motion Module S1: First inner side S2: Second inner side S3: Third inner side S4: Fourth inner side S5: Fifth inner side S6: Sixth inner side S7: Seventh inner side S8: Eighth inner side S9: Ninth inner side S10: Tenth Inner Side A1: First Current A2: Second current A3: Third Current

Claims

1. A multi-axis magnetic sensing structure for sensing an external magnetic field, the multi-axis magnetic sensing structure comprising: an outer frame, comprising: a first power input terminal coupled to the outer frame; a second power input terminal coupled to the outer frame; a first power output terminal coupled to the outer frame; and a second power output terminal coupled to the outer frame; a first connecting component comprising: a first flexible member, one end of which is disposed on a first inner side of the outer frame and coupled to the first power input terminal and the second power input terminal; and a second flexible member, one end of which is disposed on a second inner side of the outer frame, the second flexible member being disposed opposite to the first flexible member and coupled to the first power output terminal and the second power output terminal; A first differential capacitor, one end of which is disposed on the first inner side of the outer frame and adjacent to the first flexible member; and a second differential capacitor, one end of which is disposed on the second inner side of the outer frame and adjacent to the second flexible member; a first axial motion module, one outer side of which is disposed on the other end of one of the first differential capacitors and the other end of one of the second differential capacitors, the first axial motion module being coupled to and disposed on the other end of one of the first flexible member and the other end of one of the second flexible member; a second connecting assembly, comprising: a third differential capacitor, one end of which is disposed on the third inner side of one of the first axial motion modules; a fourth differential capacitor, one end of which is disposed on the fourth inner side of one of the first axial motion modules; a third flexible member, one end of which is coupled to and disposed on the fifth inner side of one of the first axial motion modules; and a fourth flexible member, which is disposed opposite to the third flexible member, one end of which is coupled to and disposed on the sixth inner side of one of the first axial motion modules; A second axial motion module, one of its outer sides being disposed at the other end of one of the third differential capacitors and the other end of one of the fourth differential capacitors, the second axial motion module being coupled to and disposed at the other end of one of the third flexible members and the other end of one of the fourth flexible members.

2. The multi-axis magnetic sensing structure as described in claim 1, wherein the first power input terminal provides a first current that passes through the outer frame, the first flexible member, the first axial motion module, the third flexible member to the second axial motion module, the first current surrounds the second axial motion module and then passes through the fourth flexible member, the first axial motion module, the second flexible member, the outer frame to the first power output terminal, the second axial motion module generates a Z-direction motion based on the external magnetic field and the first current, and the changes in the capacitance values ​​of the third differential capacitor and the fourth differential capacitor correspondingly generate the second axial motion. The first displacement of one of the motion modules generates the external magnetic field in the Y direction; and the second power input terminal provides a second current through the outer frame and the first flexible member to the first axial motion module. The second current surrounds the first axial motion module and then passes through the second flexible member and the outer frame to the second power output terminal. The first axial motion module generates a Y-direction motion according to the external magnetic field and the second current. The change in the capacitance values ​​of the first differential capacitor and the second differential capacitor corresponds to the second displacement of one of the first axial motion modules, thereby generating the external magnetic field in the Z direction.

3. The multi-axis magnetic sensing structure as described in claim 1, wherein the first connecting component further comprises: a fifth flexible member, one end of which is disposed on the first inner side of the outer frame and coupled to the first power input terminal and the second power input terminal; and a sixth flexible member, which is disposed opposite to the fifth flexible member, one end of which is disposed on the second inner side of the outer frame and coupled to the first power output terminal and the second power output terminal.

4. The multi-axis magnetic sensing structure as described in claim 3, wherein the second power input terminal provides a second current through the outer frame and the fifth flexible member to the first axial motion module, the second current surrounds the first axial motion module and then passes through the sixth flexible member and the outer frame to the second power output terminal, the first axial motion module generates a Y-direction motion according to the external magnetic field and the second current, and the change in the capacitance values ​​of the first differential capacitor and the second differential capacitor corresponds to the generation of a second displacement of the first axial motion module, so as to generate a Z-direction magnetic field value of the external magnetic field.

5. The multi-axis magnetic sensing structure as described in claim 1, wherein the first axial motion module and the second axial motion module operate simultaneously, and the first axial motion module operates at a first resonant frequency, and the second axial motion module operates at a second resonant frequency.

6. A multi-axis magnetic sensing structure for sensing an external magnetic field, the multi-axis magnetic sensing structure comprising: an outer frame, comprising: a first power input terminal coupled to the outer frame; a second power input terminal coupled to the outer frame; a third power input terminal coupled to the outer frame; a first power output terminal coupled to the outer frame; a second power output terminal coupled to the outer frame; and a third power output terminal coupled to the outer frame; a third connecting component comprising: a fifth differential capacitor, one end of which is disposed on a first inner side of the outer frame; and a sixth differential capacitor disposed opposite to the fifth differential capacitor, one end of which is disposed on a second inner side of the outer frame; A seventh flexible member, one end of which is disposed on the seventh inner side of the outer frame and coupled to the first power input terminal, the second power input terminal, the third power input terminal, the first power output terminal, the second power output terminal, and the third power output terminal; An eighth flexible member is disposed opposite to the seventh flexible member, one end of which is disposed on the eighth inner side of the outer frame and coupled to the first power input terminal, the second power input terminal, the third power input terminal, the first power output terminal, the second power output terminal, and the third power output terminal; a third axial motion module is disposed on one outer side of the other end of the fifth differential capacitor and the other end of the sixth differential capacitor, and is coupled to and disposed on the other end of the seventh flexible member and the other end of the eighth flexible member; a first connecting assembly includes: a first flexible member, one end of which is disposed on the ninth inner side of the third axial motion module; a second flexible member, one end of which is coupled to and disposed on the tenth inner side of the third axial motion module, the second flexible member being disposed opposite to the first flexible member; a first differential capacitor, one end of which is disposed on the ninth inner side of the third axial motion module and adjacent to the first flexible member; The system includes: a second differential capacitor, one end of which is disposed on the tenth inner side of the third axial motion module and adjacent to the second flexible member; a first axial motion module, one outer side of which is disposed on the other end of one of the first differential capacitors and the other end of one of the second differential capacitors, the first axial motion module being coupled to and disposed on the other end of one of the first flexible member and the other end of one of the second flexible member; and a second connecting assembly comprising: a third differential capacitor, one end of which is disposed on the third inner side of one of the first axial motion modules; and a fourth differential capacitor corresponding to the third differential capacitor, one end of which is disposed on the fourth inner side of one of the first axial motion modules. A third flexible member, one end of which is coupled to and disposed on the fifth inner side of one of the first axial motion modules; and a fourth flexible member, which is disposed opposite to the third flexible member, one end of which is coupled to and disposed on the sixth inner side of one of the first axial motion modules; and a second axial motion module, one outer side of which is disposed on the other end of one of the third differential capacitors and the other end of one of the fourth differential capacitors, the second axial motion module being coupled to and disposed on the other end of one of the third flexible member and the other end of one of the fourth flexible member.

7. The multi-axis magnetic sensing structure as described in claim 6, wherein the first power input terminal provides a first current that passes through the outer frame, the eighth flexible member, the third axial motion module, the first flexible member, the first axial motion module, the third flexible member to the second axial motion module, the first current surrounds the second axial motion module and then passes through the fourth flexible member, the first axial motion module, the second flexible member, the third axial motion module, the eighth flexible member, the outer frame to the first power output terminal, the second axial motion module generates a Z-direction movement based on the external magnetic field and the first current, and the change in capacitance values ​​of the third differential capacitor and the fourth differential capacitor correspondingly generates a first displacement of the second axial motion module to generate a Y-direction magnetic field value of the external magnetic field; the second power input terminal provides a second current that passes through the outer frame, the eighth flexible member, the third axial motion module, the first flexible member to the first axial motion module, the second current... The current flows around the first axial motion module, then through the second flexible member, the third axial motion module, the eighth flexible member, and the outer frame to the second power output terminal. The first axial motion module generates a Y-direction motion based on the external magnetic field and the second current. The change in capacitance values ​​of the first differential capacitor and the second differential capacitor corresponds to the second displacement of the first axial motion module, thereby generating a Z-direction magnetic field value of the external magnetic field. The third power input terminal provides a third current that flows through the outer frame and the eighth flexible member to the third axial motion module. The third current flows around the third axial motion module, then through the eighth flexible member and the outer frame to the third power output terminal. The third axial motion module generates a Z-direction motion based on the external magnetic field and the third current. The change in capacitance values ​​of the fifth differential capacitor and the sixth differential capacitor corresponds to the third displacement of the third axial motion module, thereby generating a X-direction magnetic field value of the external magnetic field.

8. The multi-axis magnetic sensing structure as described in claim 6, wherein the first connecting component further comprises: a fifth flexible member, one end of which is disposed on the ninth inner side of the outer frame; and a sixth flexible member disposed opposite to the fifth flexible member, one end of which is disposed on the tenth inner side of the outer frame.

9. The multi-axis magnetic sensing structure as described in claim 6, wherein the first axial motion module, the second axial motion module, and the third axial motion module operate simultaneously.

10. The multi-axis magnetic sensing structure as described in claim 6, wherein the first axial motion module operates at a first resonant frequency, the second axial motion module operates at a second resonant frequency, and the third axial motion module operates at a third resonant frequency.

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