Optical coupling verification method

Abstract

An optical coupling verification method used in a silicon photonic wafer testing system is provided. The silicon photonic wafer testing system includes a wafer prober, coupling actuator device, an optic inspection device, and an integrated control module electrically connected to the wafer prober, the coupling actuator device, and the optic inspection device. A fiber optics array is disposed on the coupling actuator device and located on an optical path generated by the optic inspection device. The optical coupling verification method comprises: receiving a verification kit into the wafer prober. The integrated control module drives an upward camera to align the fiber optics array and drives a downward camera to align the verification kit to obtain a relative position relation of the fiber optics array and the verification, and then performs coupling verification to obtain a characteristics variation of light on the optical path.

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