Method of testing silicon containing components using lasers

Abstract

The present invention provides a method of testing silicon-containing components using lasers. The method uses a signal generator to make a reference circuit generate a first signal, and uses a laser beam to scan the circuit. When the laser beam scan a silicon-containing element of the reference circuit and generates a current, the reference circuit generates a second signal. A control unit obtains an error rate according to the first signal and the second signal, and when the error rate is greater than a threshold value The control unit causes an alarm unit to transmit an alarm signal. The present invention provides a method for testing silicon-containing components using lasers to solve the problems of expensive testing costs, dangerous testing environments, and difficulty in testing small-area circuits due to the need to use a particle accelerator when performing radiation resistance testing on conventional circuits. By comparing the error rate and threshold values for different purposes, the circuit can be quickly tested.

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