Method for defect analysis and inspection system

Abstract

of an image sensor of the camera, the processing device deriving a height information of the product surface from a spatial distribution of the reflected multichromatic light beam in the image plane and a position of the optical detection unit relative to the product, wherein the processing device identifies an intensity value for each pixel within an interval of the spatial distribution of intensity values of the reflected multichromatic light beam in the image plane, said interval extending across at least two pixels of the image sensor, the processing device determining a location of a median and / or mode of the spatial distribution in the image plane based on the respective intensity values.

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