Material characterization using grey level measurement and x-ray characterization

TW202632259APending Publication Date: 2026-08-01APPL MATERIALS ISRAEL LTD
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
APPL MATERIALS ISRAEL LTD
Filing Date
2025-10-13
Publication Date
2026-08-01

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Abstract

Disclosed is a non-destructive and localized method for characterization of samples using high sampling rate scanning electron microscope (SEM) and low sampling EDX, by building a correlation plot, thereby allowing a fast characterization of features that typically require EDX analysis.
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