Organic defect source identification using artificial intelligence

Abstract

Methods and systems for organic defect source identification using artificial intelligence (AI) are provided. One or more images depicting a surface of a substrate processed using one or more manufacturing equipment is provided as input to an artificial intelligence (AI) model. Output(s) of the AI model is obtained, where the output(s) indicate defect characterization data associated with a defect detected on the surface of the substrate depicted by the one or more images. A determination is made of whether a level of confidence of at least one defect type and associated defect source from the defect characterization data satisfies one or more confidence criteria. Upon a determination that at least one defect type and associated defect source satisfy the one or more confidence criteria, the at least one defect type and associated defect source are provided to a client device for presentation to one or more users.

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