Gas sensing chip, manufacturing method thereof and gas sensing device
TW202632264APending Publication Date: 2026-08-01NATIONAL TSING HUA UNIVERSITY
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- NATIONAL TSING HUA UNIVERSITY
- Filing Date
- 2025-01-23
- Publication Date
- 2026-08-01
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Figure TWG2TA001069796_001 
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Abstract
According to the present disclosure, a manufacturing method of a gas sensing chip includes the following steps. A two-dimensional semiconductor is provided. A gas selectivity-enhancing compound is coated on a surface of the two-dimensional semiconductor. The gas selectivity-enhancing compound includes at least one of hexagonal boron nitride, zeolitic imidazolate framework and copper phthalocyanine. Therefore, by coating the gas selectivity-enhancing compound on the two-dimensional semiconductor, the sensitivity, selectivity and stability of the gas sensing chip can be improved.
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