Method of fabricating semiconductor device for sensing target biological material, biologically sensitive semiconductor device, and biosensor field-effect transistor 2-dimensional array

Abstract

A semiconductor biologically sensitive semiconductor device fabrication method and structure includes a biosensor microwell or well transistor and a reference electrode transistor; a biosensor microwell or well into which a biological material may be selectively introduced and a reference electrode cavity into which a reference material may be selectively introduced; a biologically sensitive layer within the biosensor microwell or well that is reactive to the biological material; and wherein the reference electrode cavity is located proximate to the biosensor microwell or well.

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