Cleaning method of silicon photonic wafer testing system

Abstract

A cleaning method of silicon photonic wafer testing system is provided. The silicon photonic wafer testing system includes a wafer prober, an optical coupling device, and an integrated control module. The cleaning method comprises: aligning a fiber optics array via an integrated control module driving an upward camera of the wafer prober; aligning a cleaning kit via the integrated control module driving a downward camera of the wafer prober; and the integrated control module drives the cleaning kit to clean the fiber optics array. The silicone photonic wafer testing system includes the wafer prober having a probe stage and the cleaning kit, the upward camera, and the downward camera disposed in the probe stage, an optical coupling device disposed on the probe stage, and the integrated control module electrically connected to the wafer prober and the optical coupling device. The fiber optics array is load onto the optical coupling device.

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