Silicon photonic wafer testing system and testing method thereof

Abstract

A silicon photonic wafer testing system including a wafer prober, an optical coupling actuator, an optical meter, and an integrated control module is provided. The wafer prober includes an upward camera, a downward camera, and a probe card. A silicon photonic wafer is carried on a stage member of the wafer prober. The probe card is disposed above the stage member. At least one optical fiber array is carried on a holder of the optical coupling actuator, and the optical fiber array is located on an optical path generated by the optical meter. The integrated control module is electrically connected to the wafer prober, the optical coupling actuator, and the optical meter. A silicon photonic water testing method is also provided.

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