Temperature regulation system and temperature regulation method

Abstract

A technology is provided that enables the temperature of an object to be adjusted over a wide temperature range. The temperature adjustment system adjusts the temperature of the object in contact with a structure. The temperature adjustment system includes: a liquid supply unit that supplies liquid refrigerant to the structure; a gas supply unit that supplies gaseous refrigerant to the structure; and a control unit that controls the liquid supply unit and the gas supply unit. The control unit controls the following processes: when the temperature of the object is above a first temperature threshold, cooling the structure using the latent heat of vaporization of the liquid refrigerant (after it is mixed into a mist by the supply of liquid and gaseous refrigerant); when the temperature of the object is below the first temperature threshold but above a second temperature threshold, cooling the structure using the liquid refrigerant supplied from the liquid supply unit; and when the temperature of the object is below the second temperature threshold, cooling the structure using the gaseous refrigerant supplied from the gas supply unit.

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