Semiconductor devices

Abstract

This disclosure relates to a semiconductor device equipped with a Test Element Group (TEG) for inspecting the electrical characteristics of a main element using an inspection apparatus. The TEG has an evaluation element comprising a main element and a sub-element. A first terminal of the main element is open for irradiation by a pulsed charged particle beam. A second terminal of the main element is connected to the first terminal of the sub-element, and the second terminal of the sub-element is grounded. The electrical characteristics of the sub-element are designed such that the combined electrical characteristics of the main element and the sub-element constitute the region of electrical characteristics that can be inspected by the inspection apparatus.

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