Semiconductor device and method of manufacturing the same

Abstract

The present disclosure describes a semiconductor coupling device having a transmission line structure with a tunable microwave index. The semiconductor coupling device includes an optical waveguide on a substrate and a transmission line structure on the substrate and adjacent to the optical waveguide. The transmission line structure includes a first grille structure and a second grille structure. The semiconductor coupling device further includes an interconnect structure connected to the transmission line structure. The interconnect structure couples the transmission line structure to the optical waveguide and includes a transistor configured to electrically connect the first grille structure to the second grille structure.

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