Optical devices and methods of forming the same

Abstract

A method includes forming a photonic integrated circuit including: a first waveguide; a second waveguide over the first waveguide, wherein the second waveguide is optically coupled to the first waveguide; a first external coupler that is optically coupled to the second waveguide; and a first interconnect structure; attaching an electronic die to a first side of the photonic integrated circuit; direct bonding a first photonic die to a second side of the photonic integrated circuit, wherein the first photonic die is optically coupled to the first waveguide after the direct bonding; and forming a second interconnect structure over the first photonic die and the photonic integrated circuit.

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