MEMS mirror array module

TW202632375APending Publication Date: 2026-08-01CARL ZEISS SMT GMBH
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
CARL ZEISS SMT GMBH
Filing Date
2025-11-20
Publication Date
2026-08-01

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Abstract

A gas atmosphere having a thermal conductivity of more than is introduced in a gap
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