Semiconductor fabrication tool, load port for and method of operating such a tool

Abstract

The present invention provides a semiconductor manufacturing tool (100) for processing a semiconductor manufacturing article, particularly a one-fold reduction mask, particularly a storage container. The tool includes at least one loading port (151, 152, 153, 154), an article handler (112, 114), and an article processing unit (120). The loading port (151, 152, 153, 154) is configured to receive and hold the article in a transport container (200) from outside the tool (100), open the transport container (200), and provide access for the article handler (112, 114) to the article within the transport container (200). The article processing unit (120)... An assembly is provided to process a predetermined number of items, wherein processing an item particularly includes storing the item in a separate storage location, wherein the item handlers (112, 114) are assembled to pick up an item from the item processing unit (120) and / or pick up the item from an open conveyor container (200), and transfer the item between the conveyor container (200) and the item processing unit (120), the tool (100) further including a container storage unit (220) and a container handler (212) for transferring the conveyor container (200) between the container storage unit (220) and the loading ports (151, 152, 153, 154). Furthermore, a loading port (151, 152, 153, 154) for such a tool (100) and a method for operating such a tool (100) are provided. The invention provides a semiconductor fabrication tool, particularly a stocker, (100) for processing a semiconductor fabrication article, particularly a reticle, the tool comprising at least one load port (151, 152, 153, 154), an article handler (112, 114), and an article processing unit (120), wherein the load port (151, 152, 153, 154) is configured to accept, from outside the tool (100), a transport container (200) holding the article, to open the transport container (200), and to provide the article handler (112, 114) with access to the article within the transport container (200), wherein the article processing unit (120) is configured to process a predetermined number of articles, wherein processing an article particularly comprises storing the article in a respective storage position, wherein the article handler (112,114) is configured to retrieve an article from the article processing unit (120) and / or to retrieve the article from the opened transport container (200) and to transfer the article between the transport container (200) and the article processing unit (120), the tool (100) further comprising a container storage unit (220) and a container handler (212) for transferring the transport container (200) between the container storage unit (220) and the load port (151, 152, 153, 154). Further, a load port (151, 152, 153, 154) for such a tool (100) and a method for operating such a tool (100) are provided.,

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