Method for exchanging optical elements of an apparatus for semiconductor technology

TW202632427APending Publication Date: 2026-08-01CARL ZEISS SMT GMBH
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
CARL ZEISS SMT GMBH
Filing Date
2025-09-22
Publication Date
2026-08-01

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Abstract

in the region provided therefor with a predefined wavelength that is different from the productive wavelength; d) if the wavefront measurement yields a wavefront aberration: adapting the positioning and orientation of at least the exchanged optical element
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