Mask transfer device and mask transfer method

TW202632428APending Publication Date: 2026-08-01SHANGHAI YUWEI SEMICON TECH CO LTD
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
SHANGHAI YUWEI SEMICON TECH CO LTD
Filing Date
2025-10-01
Publication Date
2026-08-01

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    Figure TWG2TA001070663_003
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Abstract

A mask transfer device and a mask transfer method, the device comprising: a base; a cover opening mechanism, provided on the base and used for opening a cover of a mask storage box; a transfer mechanism, provided on the base and having a grabbing assembly at its output end for grabbing a mask; in the grabbing assembly, two clamping members are both movably constrained to a grabbing seat along a width direction, and can move closer to or farther away from each other; the two rotating members are spaced apart in the width direction and can both rotate about their own axes; the clamping transmission member is in the form of a belt and is wound between the two rotating members, and two transmission parts extending in the width direction and parallel to each other are formed between the two rotating members, and the two transmission parts are respectively connected to the corresponding clamping members; the clamping driver is provided on the grabbing seat, and the output end is connected to the clamping member or one of the rotating members.
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