Control device, optical system, lithography apparatus and method

Abstract

A control device (100) for controlling an actuator (200) for actuating an optical element (310) of an optical system (300), the control device (100) comprising: a voltage measuring unit (110) coupled to the actuator (200) and configured to provide a measuring voltage (V1) indicating a control voltage (V2) present at the actuator (200); and a charge source (120) configured to provide a control current (I1) to control the charge of the actuator (200) according to a setpoint position signal (P) for setting the position of the optical element (310) and the provided measuring voltage (V1). A control device (100) for controlling an actuator (200) for actuating an optical element (310) of an optical system (300), a voltage measuring unit (110) coupled to the actuator (200) and configured to provide a measured voltage (V1) indicative of a control voltage (V2) present at the actuator (200), and comprising a charge source (120) configured to provide a control current (I1) for controlling the charge of the actuator (200) as a function of a setpoint position signal (P) for setting a position of the optical element (310) and of the provided measured voltage (V1).

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