Stage apparatus, lithography apparatus, article manufacturing method, and driving method for stage apparatus

Abstract

A stage apparatus is provided. The stage apparatus includes: a first stage; a first actuator configured to drive the first stage; a second stage supported by the first stage; a second actuator configured to contactlessly transmit a thrust applied to the first stage by the first actuator to the second stage; a driver configured to drive the second actuator; and a controller configured to control the first actuator and the driver. In a case of applying an electric brake to the first stage by using the first actuator, the controller is configured to apply the electric brake after a lapse of a predetermined time since output of control signal for controlling the second actuator from the driver is stopped.

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