Position detection method, position detection system, and exposure device

Abstract

A position detection method includes: illuminating a position detection mark formed on an object and having a height in a direction orthogonal to the surface of the object using an illumination optical system; focusing light from the area where the position detection mark is formed using an imaging optical system to form an image corresponding to the position detection mark; capturing the image corresponding to the position detection mark using a photographic unit; and detecting the position of the object based on a capture signal from the photographic unit; and further includes: driving a holding device that holds and moves the object in a direction intersecting the surface of the object while setting the illumination σ value, determined by the ratio of the numerical aperture of the illumination optical system to the numerical aperture of the imaging optical system, to 0.7 or less, and capturing the image corresponding to the position detection mark in a defocused state. none

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