Pattern drawing device

Abstract

A pattern drawing device includes a mirror housing. The mirror housing includes one or more sidewalls disposed around the sides of a polygon mirror and extending circumferentially along the polygon mirror. The sidewalls have: a fluid inlet, a fluid outlet, an entrance window for a light beam from a light source, and an exit window for a light beam reflected by a plurality of reflective surfaces. At least a portion of the exit window is sealed by a translucent element through which the light beam can pass. The outlet and the exit window are located in circumferentially spaced portions of the one or more sidewalls.

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