Information processing apparatus and information processing method
TW202632452APending Publication Date: 2026-08-01EBARA CORP
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-10-28
- Publication Date
- 2026-08-01
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Abstract
This invention provides an information processing apparatus that can appropriately classify machine operating modes using only operating data that records machine state quantities in a time series. The information processing apparatus 2 of this invention includes: a diagnostic data generation unit 203, which generates diagnostic data by segmenting the operating data—which records the measurement results obtained by a detector installed on the machine (vacuum pump 11) that changes state quantities according to the machine's operation—based on characteristic quantities of the operating data at the transition moments of machine operating state changes; and a classification processing unit 204, which calculates the similarity between multiple classification data (which serves as a basis for classifying operating states based on multiple operating modes included in a group of operating modes) and diagnostic data for each operating mode, and classifies the group of operating modes based on the similarity of each operating mode.
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