Frame aggregation for multi-beam raster scanning microscopes

TW202632602APending Publication Date: 2026-08-01CARL ZEISS MULTISEM GMBH
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
CARL ZEISS MULTISEM GMBH
Filing Date
2024-11-04
Publication Date
2026-08-01

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Abstract

multi-beam raster scanning microscopes. Image registration parameters can be assessed and adjusted, if required. This yields better image registration, resulting in a better quality of the overall composite image.
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