Charged particle-optical apparatus

Abstract

An electron-optical projection device for projecting at least one charged particle beam towards a sample, the device comprising: a beam directing element configured to project the at least one charged particle beam towards a sample location on the sample, wherein the electron-optical projection device further comprises an optical member configured to direct stimulation light towards the sample so that the stimulation light is at least partially coincident with the at least one charged particle beam, wherein the optical member comprises a first surface facing down-beam, at least part of the first surface comprising a coating layer being at least partially transparent for the stimulation light and being electrically conductive.

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