Precise automated control of lamella lift-out

Abstract

A method of preparing a sample for electron microscopy imaging includes providing a substrate in an electron microscopy system comprising a probe for manipulating a freed sample of the substrate, applying a current flow between a stage of the system and the probe, detecting a first change in current flow in connection with contacting the sample with the probe, after detecting the first change in current flow, extracting the sample from the substrate with the probe, detecting a second change in current flow in connection with extracting the sample from the substrate, and confirming the sample is extracted from the substrate based at least in part on the second change in current flow.

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