Detector module

Abstract

A detector module configured to detect charged particles emitted by a sample, the detector module comprising a detector unit electrically coupled to a conversion unit; the detector unit comprising a detector substrate, comprising a detector element and a pre-amplifier circuit electrically connected to the detector element, the detector substrate comprising a first metal material for conducting signals in the detector substrate; the conversion unit comprising a conversion circuit and / or a data routing circuit, the conversion circuit and / or the data routing circuit integrated into a conversion substrate, the conversion substrate comprising a second metal material for conducting signals in the conversion substrate; wherein the first conducting metal material is different from the second conducting metal material.

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