Diffusion model in scanning charged-particle microscope image quality enhancement

Abstract

An apparatus for determining measurements of a feature on a wafer from a denoised image includes a memory storing a set of instructions and at least one processor configured to execute the set of instructions to cause the apparatus to perform: applying a trained diffusion neural network model to denoise scanning charged-particle microscope (SCPM) images, wherein the trained diffusion neural network model has been trained to denoise a received SCPM image of the wafer; determining an averaged image as an average of the denoised SCPM images; and determining measurements of the feature based on the averaged image.

Images