Automated chemical switching for material delayering

Abstract

Provided herein is a method for delayering heterogeneous materials. Also provided herein is a method comprising delayering, at a first time, a multilayered material until a first endpoint condition is satisfied, determining a change to the delayering setting based on the first endpoint condition being satisfied, and delayering, at a second time subsequent to the first time, the multilayered material until a second endpoint condition is satisfied. Further provided herein is a non-transitory computer-readable medium embodying program code comprising instructions which, when executed by a processor, cause the processor to perform operations comprising delayering, at a first time, a multilayered material until a first endpoint condition is satisfied, determining a change to the delayering setting based on the first endpoint condition being satisfied, and delayering, at a second time subsequent to the first time, the multilayered material until a second endpoint condition is satisfied.

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