Method and device for processing and / or examining a sample using a particle beam, and computer program for executing the method

TW202632727APending Publication Date: 2026-08-01CARL ZEISS SMT GMBH
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
CARL ZEISS SMT GMBH
Filing Date
2024-07-26
Publication Date
2026-08-01

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    Figure TWG2TA001071843_003
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Abstract

applying a voltage to an element (H) in surroundings of the sample, based at least in part on the determined electrostatic charge state; wherein the element (H) comprises two or more segments; and / or wherein the element (H) is movable relative to the sample
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