Gas injector assembly with improved gas mixing

TW202632733APending Publication Date: 2026-08-01APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2025-09-17
Publication Date
2026-08-01

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Abstract

Gas distribution inserts configured to deliver a gas in semiconductor manufacturing processing chambers are described. The gas distribution insert comprises a plurality of randomly oriented gas openings extending through the thickness of the inlet end wall. An inner gas channel extends from the outlet end wall face to the insert outlet end, and the inner gas channel is bounded by an inner gas channel sidewall. The gas distribution inserts include at least two gas inlets extending through the inner gas channel sidewall.
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