Microwave plasma source with non-cylindrical cavity antennas
TW202632742APending Publication Date: 2026-08-01APPLIED MATERIALS INC
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2025-10-03
- Publication Date
- 2026-08-01
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Figure TWG2TA001070700_001 
Figure TWG2TA001070700_002 
Figure TWG2TA001070700_003
Abstract
Embodiments described herein relate to an apparatus that includes a plate, where the plate includes a first dielectric material, and a resonator coupled to the plate. In an embodiment, the resonator includes a second dielectric material, and the resonator has a cross-sectional shape with a first end with a first width and a second end with a second width that is smaller than the first width. In an embodiment, the first end faces the plate.
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