A conductive semi-transparent solar blind photocathode underlayer

TW202632754APending Publication Date: 2026-08-01PHOTONIS NETHERLANDS
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
PHOTONIS NETHERLANDS
Filing Date
2025-11-14
Publication Date
2026-08-01

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Abstract

This invention relates to a solar-blind photocathode device, comprising: a substrate; and a photocathode layer disposed on the substrate. The solar-blind photocathode device is characterized by a conductive underlayer disposed between the substrate and the photocathode layer, wherein the conductive underlayer comprises a first nickel layer (130) directly deposited on the substrate, and a second aluminum oxide layer (140) deposited on the first nickel layer, wherein the second layer is obtained by natural oxidation of aluminum or direct vapor deposition of aluminum oxide. The aluminum oxide is configured to form an aluminum oxide interface with the photocathode layer. The conductive underlayer is configured to provide conductivity to the photocathode while maintaining high quantum efficiency in the deep ultraviolet spectrum.
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