Methods for generating and amplifying laser pulses, methods for generating plasma that emits secondary radiation, methods for manufacturing microwafers or semiconductor intermediates, and optical devices.

Abstract

A method for generating and amplifying laser pulses (12, 14) by means of an optical amplifier (32), wherein the optical amplifier (32) has a laser-active solid (34) for amplifying the laser pulses (12, 14). The method includes: generating a first type of laser pulse (12); generating a second type of laser pulse (14); generating a population inversion in the laser-active solid (34); and amplifying the first type of laser pulse (12) and the second type of laser pulse (14) by means of the optical amplifier (32) such that the first type of laser pulse (12) and the second type of laser pulse (14) pass through the laser-active solid (34) during the population inversion. The first type of laser pulse (12) and the second type of laser pulse (14) are different from each other in wavelength.

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