Composite substrate and surface acoustic wave device

Abstract

object of the invention is to provide a composite substrate which contains an amorphous silicon layer having a high volume resistivity and in which electrical loss is significantly suppressed. A composite substrate according to an embodiment of the invention comprises a support substrate, an amorphous silicon layer, and a piezoelectric layer in that order. In one embodiment, the full width at half maximum of the TO peak in the Raman spectrum of the amorphous silicon layer is

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