Multi-pulse signal flexible drive adjustment device and method

Abstract

A flexible multi-pulse signal driving adjustment device and method, belonging to the field of radio frequency power supply technology, solves the problem that conflicts easily occur during the switching process of two different pulse signals, leading to the conduction of all-switching transistors in the power amplifier. In this device, a multi-pulse generator generates multi-level pulse signals; a switcher switches the pulse signals output by the multi-pulse generator; during the transition period of the multi-level pulse signal switching: a switching enable controller generates pulse switching adjustment signals in stages according to the levels of the pulse signals before and after the switching, so as to control at least one of the output power and frequency to gradually increase or decrease in a ramp manner; and according to the pulse switching adjustment signals generated in stages, a control signal for the power amplifier is generated in stages; the power amplifier of the radio frequency power supply drives the radio frequency power supply based on the control signal of the power amplifier, and adjusts the output power and frequency of the radio frequency power supply in stages during the transition period of the multi-level pulse signal switching.

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