Susceptor for processing substrates

Abstract

A susceptor with ESC functionality is presented. To provide a heater with metal material for thermal control and ESC capabilities, the present disclosure's susceptor comprises a supporting part configured to support a substrate, a heating coil disposed in the supporting part, the heating coil configured to heat up the temperature of the support, a thermocouple (TC) disposed in the supporting part for monitoring temperature of the supporting part, a shaft disposed below the supporting part, an insulation part disposed in the shaft, a plurality of cooling channels disposed in the insulation part; and insulation layers disposed on the surface of the supporting part and the insulating part, wherein the supporting part is made of conducting metals.

Images