Substrate processing apparatus and upper electrode assembly

Abstract

The substrate processing apparatus disclosed in this invention includes a chamber, a substrate support, and an upper electrode assembly. The substrate support is disposed within the chamber. The upper electrode assembly is disposed above the substrate support. The upper electrode assembly includes a top plate, a support body, and a rod assembly. The support body is disposed above the top plate. The rod assembly includes an upper part supported by the support body and a rod extending downward from the upper part. The rod supports the top plate in a manner that allows it to deform laterally along a direction intersecting the vertical.

Images