Semiconductor structure and method of manufacturing the same

Abstract

Embodiments of this disclosure provide a semiconductor structure. The semiconductor structure includes a capacitor over a substrate, a conductive cell on the capacitor, a vertical transistor on the conductive cell, a first oxide layer surrounding a lower portion of the vertical transistor, a first conductive layer surrounding a middle portion of the vertical transistor, and a second oxide layer surrounding an upper portion of the vertical transistor.

Images