Semiconductor device

Abstract

A semiconductor device includes: first and second source / drain patterns on a first side of a back wiring line; a channel pattern between the first and second source / drain patterns; a back source / drain contact between the first source / drain pattern and the back wiring line; and a sacrificial semiconductor pattern between the second source / drain pattern and the back wiring line, and in contact with the second source / drain pattern. A height from the first side of the back wiring line to a lowermost portion of the first source / drain pattern is greater than a height from the first side of the back wiring line to a lowermost portion of the second source / drain pattern. The back source / drain contact includes a first side connected to the first source / drain pattern, and a second side connected to the back wiring line. The first side of the back source / drain contact has a concave shape.

Images