Transfer method

TW202633228APending Publication Date: 2026-08-01SHIN ETSU CHEMICAL CO LTD
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
SHIN ETSU CHEMICAL CO LTD
Filing Date
2021-09-16
Publication Date
2026-08-01

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Abstract

The present invention proposes a method and apparatus for transferring components arranged on a first substrate to a second substrate using laser light while correcting their positional offset. The method involves acquiring the actual position information of the components on the first substrate, grouping them according to a reference determined by an allowable positional offset, correcting the position of the first substrate in a manner that limits the position of the components to within the allowable positional offset range, and transferring the components to the second substrate by irradiating laser light from the back of the first substrate.
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