Sensor device and method of producing a sensor device by direct atomic layer processing
TW202633261APending Publication Date: 2026-08-01ATLANT 3D
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- ATLANT 3D
- Filing Date
- 2025-03-20
- Publication Date
- 2026-08-01
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Abstract
The disclosure relates to a sensor device and method for producing a sensor device, comprising a substrate and an array of sensing elements for interacting with an environment, wherein each sensing element includes a thin-film deposit of material on the substrate so as to provide the sensing elements with mutually different sensitivity properties.
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