Optical heating apparatus

Abstract

Providing an optical heating apparatus capable of increasing the illuminance of heating light to be applied to a central portion of a substrate to be treated, even in a case where there is a restriction on the disposition of an LED element in a region that faces the central portion. The optical heating apparatus includes: a support unit that supports the substrate to be treated; a light source unit that includes an LED substrate that is disposed to face the substrate to be treated, and a plurality of LED elements; and an optical system that refracts at least a portion of light emitted by the plurality of LED elements, toward a central portion of the substrate to be treated, wherein the light source unit is configured to include a space facing the substrate to be treated at least in a vicinity of a normal of the substrate.

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