Method and device for cleaning semiconductor devices and carriers for semiconductor devices
TW202633311APending Publication Date: 2026-08-01BROOKS AUTOMATION GERMANY
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- BROOKS AUTOMATION GERMANY
- Filing Date
- 2025-11-05
- Publication Date
- 2026-08-01
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Figure TWG2TA001071050_001 
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Figure TWG2TA001071050_003
Abstract
Method for cleaning items used in the field of semiconductor manufacturing, especially semiconductor devices such as wafers and reticles, containers, especially carrier and / or storage pods such as FOUPs, FOSBs, EUV double pods, and surfaces, comprising a main cleaning process, wherein the main cleaning process is preceded by a pre-treatment process and / or followed by a post-treatment process.
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