Substrate processing system and substrate processing apparatus

TW202633322APending Publication Date: 2026-08-01TOKYO ELECTRON LTD
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2025-07-30
Publication Date
2026-08-01

Smart Images

  • Figure TWG2TA001070236_001
    Figure TWG2TA001070236_001
  • Figure TWG2TA001070236_002
    Figure TWG2TA001070236_002
  • Figure TWG2TA001070236_003
    Figure TWG2TA001070236_003
Patent Text Reader

Abstract

This invention provides a technique for improving power efficiency in a substrate processing system. The substrate processing system includes: a flexural member configured to flex due to pressure variations; and a power generation element mounted on the flexural member and configured to generate electricity by means of the flexural member's flexure.
Need to check novelty before this filing date? Find Prior Art