Semiconductor processing equipment and control method thereof

Abstract

This application provides a semiconductor processing equipment and a control method thereof; wherein, during each process step of executing a process recipe by the semiconductor processing equipment, if an alarm is generated in the current process step, the type of alarm is determined. The process recipe is configured with multiple alarm types and corresponding fault-tolerant control operations for each alarm type. The fault-tolerant control operation is used to represent remedial measures that ensure the semiconductor processing equipment remains in a safe state when an alarm occurs. The corresponding target fault-tolerant control operation is determined according to the alarm type, and the semiconductor processing equipment is controlled to operate according to the target fault-tolerant control operation, so as to remedy the product at the time the alarm occurs. In this way, fault-tolerant control can be flexibly performed based on the alarm type, thereby ensuring the product quality and production capacity of the semiconductor processing equipment.

Images