Boat and semiconductor process equipment

Abstract

This application discloses a boat and semiconductor process equipment, belonging to the field of semiconductor technology. The boat includes a support frame, and the interior of which is provided with a wafer carrying space. The support frame has a central axis, and at least three support pillars are spaced apart along the direction surrounding the central axis, including a first support pillar, a second support pillar, and a third support pillar. An opening for a wafer transport device to pass through is formed between the first support pillar and the second support pillar. The opening communicates with the wafer carrying space and is opposite to the third support pillar. Each support pillar has a wafer carrying surface, and the wafer carrying surfaces of each of the support pillars can support the same wafer within the wafer carrying space. The wafer carrying surfaces of the first support pillar and the second support pillar respectively extend along the direction surrounding the central axis.

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